|
|
||||||||||||
|
|
|||||||||||||
| Target utilization and life are two important factors in choosing a magnetron cathode. The table below shows typical target erosion results for many of our cathode designs. We base our measurements on "useable" target utilization and on standard "burn-through" target utilization. However, the best way to verify utilization of a target is to look at the used targets. | |||||||||||||
|
|||||||||||||
| Results are for aluminum targets, most eroded at 3 mTorr Argon at 9KW.
**We use two methods to calculate target utilization: Method A: % weight lost. Method B: % weight lost * target thickness / groove depth. Method A is useful for processes that use targets without backing plates, while method B is used when a backing plate is present, allowing erosion through the full target thickness. |
|||||||||||||