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Magnetic targets represent the most difficult challenge for utilization in the sputtering industry. High permeability materials create an inconsistent, non-linear environment for magnetic fields, severely decreasing utilization. For example, permalloy targets produce typically pinched grooves, causing a premature burn-through on the target. Under these conditions, sputtering characteristics change dramatically over the life of the target. Our patented designs (U.S. Patent #5,415,754) for magnetic targets avoid this pinching problem and provide uniform sputtering conditions throughout the target life. Sierra typically achieves between 15-20% for the same permalloy targets while our competitors typically achieve 4%-5% usage for the same materials.


Target Material
Target Thickness (in) % Utilization
Sierra Design         Other Design
CoCr
Alloys
Nickel
Permalloy
Iron
CoFe Alloys
0.375
0.250
0.200
0.200
0.200

30
17
15
15
16
15
6
5
4
4

Typical results using Sierra's design for magnetic materials (U.S. Patent #5,415,754) show a two- to four-fold increase in target utilization.






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